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GATE XE 2024 | Question: 51

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For chemical vapour deposition $\text{(CVD)}$ process, which of the following statements is/are correct?

  1. Target material is stripped off by the bombardment of positive ions
  2. Source material is vapourized and thermally decomposed
  3. Partial hydrolysis of alkoxide in water solvent
  4. Suitable for preparing films of high density and uniform thickness

     

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